Film bulk acoustic device with integrated tunable and...

Details Film bulk acoustic device with integrated tunable and... Film bulk acoustic device with integrated tunable and...

2005-08-02

2005-08-02

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S320000, C310S312000, C310S366000

Reexamination Certificate

active

06924583

ABSTRACT:
A film bulk acoustic device having integrated trimmable device comprises a FBAR and a integrated tunable and trimmable device being integrated on a common substrate, at least a common electrode or piezoelectric layer. By trimming the integrated trimmable device or the FBAR and alter either the capacitance or inductance of the integrated trimmable device until the film bulk acoustic device having integrated trimmable device achieves the target resonance frequency. By taking advantage of the electrostatic force, the integrated tunable device is capable of providing tuning until the film bulk acoustic device having integrated tunable device achieves the target resonance frequency.

REFERENCES:
patent: 5166646 (1992-11-01), Avanic et al.
patent: 5587620 (1996-12-01), Ruby et al.
patent: 6653913 (2003-11-01), Klee et al.
patent: 6710681 (2004-03-01), Figueredo et al.
patent: 6762471 (2004-07-01), Kim

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