Filament for ion implanter plasma shower

Details Filament for ion implanter plasma shower Filament for ion implanter plasma shower

1997-09-16

1999-01-05

Nguyen, Kiet T.

Radiant energy

Ion generation

Field ionization type

25049221, 250251, H01J 37317

Patent

active

058566740

ABSTRACT:
A ribbon filament (86) is provided for a thermionic emission device. The filament comprises an elongated body having a configuration defined by a length, a width, and a thickness. The length comprises a central portion (96) and first and second end portions (98) on either side of the central portion. The width of the central portion is greater than that of the first and second end portions. In addition, the thickness of the filament is substantially less than the width along its entire length. The ribbon filament (86) may be configured as a single helical coil having its first and second end portions (98) mounted to first and second legs (85), respectively, at locations of slots therein. Preferably, the filament (86) is comprised of tungsten and the first and second legs (85) are also comprised of tungsten.

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patent: 5399871 (1995-03-01), Ito et al.
patent: 5531420 (1996-07-01), Benveniste

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