Field replaceable units (FRUs) optimized for integrated...

Details Field replaceable units (FRUs) optimized for integrated... Field replaceable units (FRUs) optimized for integrated...

2008-07-08

2010-06-22

Nguyen, Tu T (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

07742163

ABSTRACT:
An Integrated Metrology Sensor (IMS) including a plurality of Field Replaceable Units (FRUs) for measuring a target on a wafer. The FRU configurations can be optimized to include the appropriate elements, so that each FRU can be pre-aligned and calibrated in the factory to minimize the time need to swap the FRU in the field due to failure or scheduled maintenance. The FRU configuration of the IMS is optimized to shorten the time to repair a failure or perform scheduled maintenance and increase the system reliability.

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