Field emitter X-ray source and system and method thereof

Details Field emitter X-ray source and system and method thereof Field emitter X-ray source and system and method thereof

2006-10-17

2006-10-17

Glick, Edward J. (Department: 2882)

X-ray or gamma ray systems or devices

Source

Electron tube

C378S123000, C378S136000

Reexamination Certificate

active

07123689

ABSTRACT:
In accordance with one embodiment, the present technique provides an X-ray source. The X-ray source includes a field emitter array having a plurality of field emitter elements disposed in a vacuum chamber and configured to emit electrons in the vacuum chamber towards an anode assembly. The X-ray source also includes an anode disposed in the vacuum chamber for receiving the electrons emitted by the field emitter array and configured to thereby generate X-ray radiation. The X-ray source further includes a source of cleaning gas coupled to the vacuum chamber, wherein the source of cleaning gas is configured to provide the cleaning gas to the vacuum chamber towards the field emitter array to reduce deposition of contaminants on or to clean contaminates from the field emitter array.

REFERENCES:
patent: 5961362 (1999-10-01), Chalamala et al.
patent: 6385292 (2002-05-01), Dunham et al.
patent: 6553096 (2003-04-01), Zhou et al.
patent: 6670629 (2003-12-01), Wilson
patent: 6750470 (2004-06-01), Wilson
patent: 6899584 (2005-05-01), Wilson
patent: 6912268 (2005-06-01), Price et al.
M. Hajra et al. “Effect of gases on the field emission properties of ultrananocrystalline diamond-coated silicon field emitter arrays”, Journal Of Applied Physics. vol. 94, No. 6. Sep. 15, 2003, pp. 4079-4083.

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