Radiant energy – Ion generation – Field ionization type
Reexamination Certificate
2006-10-17
2006-10-17
Lee, Wilson (Department: 2821)
Radiant energy
Ion generation
Field ionization type
C313S497000, C438S486000, C315S160000
Reexamination Certificate
active
07122805
ABSTRACT:
The present invention refers to a field emitter beam source (10) comprising at least one emitter (11); at least one extracting electrode (19) to extract a beam current (IE) from the emitter (11); a current source (12) for providing a predetermined beam current (IE0); a first voltage source (13) for providing a first voltage (UA) between the emitter (11) and the extracting electrode (19) to switch on the beam current (IE); and a first switch (S1) for disconnecting the first voltage source (13). With such a field emitter beam source, the emitter voltage (UE) necessary to emit a predetermined beam current (IE0) can be determined. This in turn enables the field emitter beam source (10) to generate beam current pulses with a fast rise time and a well defined beam current pulse charge Q.
REFERENCES:
patent: 5359256 (1994-10-01), Gray
patent: 5977719 (1999-11-01), Makishima
patent: 6320319 (2001-11-01), Iwai et al.
patent: 6372612 (2002-04-01), Ito et al.
patent: 6429439 (2002-08-01), Marsh
patent: 6476548 (2002-11-01), Xia
patent: 6596612 (2003-07-01), Ito et al.
patent: 6639353 (2003-10-01), Chadha
patent: 0 434 370 (1991-06-01), None
patent: 0 780 879 (2001-10-01), None
patent: 1 249 855 (2002-10-01), None
Kanemaru, et al., “Control of Emission Currents from Silicon Field Emitter Arrays using a Built-In MOSFET,” Applied Surface Science 111 (1997) 218-223.
Lu, et al., “A High Speed Circuit Scheme for Driving Field Emission Array,” 9thInt'l Vacuum Microelectronics Conference, St. Peterburg 1996.
ICT Integrated Circuit Testing Gesellschaft, fur Halbleiterpruft
Lee Wilson
Patterson & Sheridan L.L.P.
LandOfFree
Field emitter beam source and method for controlling a beam... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Field emitter beam source and method for controlling a beam..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Field emitter beam source and method for controlling a beam... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3697008