Stock material or miscellaneous articles – Composite – Of quartz or glass
Patent
1991-10-28
1994-07-26
Ryan, Patrick J.
Stock material or miscellaneous articles
Composite
Of quartz or glass
428131, 428446, 428569, 428901, B32B 900
Patent
active
053326270
ABSTRACT:
A field emission type emitter comprises: a conductive substrate; an insulating film formed on the conductive substrate; a cavity formed in the insulating film; a cathode formed on the conductive substrate in the cavity; and a gate electrode formed over the insulating film. The gate electrode is preferably made of refractory metal silicide. A polycrystalline silicon film is preferably formed between the gate electrode and the insulating film. The side walls of the insulating film in the portion of the cavity preferably have an inverse tapered shape.
In the case where a glass substrate is used, a conductive film is formed on the glass substrate through an insulating film and the cathode is formed on the conductive film in the cavity. Manufacturing methods of the field emission type emitter are also disclosed.
REFERENCES:
patent: 3921022 (1975-11-01), Levine
patent: 4708904 (1987-11-01), Shimizu et al.
Article "Microtips Fluroescent Display"--Mayer et al. 512--Japan Display--four pages.
Article "Microtips Fluorescent Display" By Meyer et al.
Hasegawa Toshiaki
Ishimaru Toshiyuki
Komatsu Hiroshi
Watanabe Hidetoshi
Lee Kam F.
Ryan Patrick J.
Sony Corporation
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