Field emission type emitter

Details Field emission type emitter Field emission type emitter

1998-03-23

2000-02-15

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

Electrode making

H01J 904

Patent

active

060246227

ABSTRACT:
A method for manufacturing a field emission type emitter including a cathode electrode formed on a substrate, an insulating film formed on the cathode electrode, a cavity formed in the insulating film, a cathode formed on the cathode electrode inside the cavity, and a gate electrode formed on the insulating film, comprising the step of electrochemically making the cathode in an electrolyte containing of a salt of a metal. The metal is typically the same as the metal forming the cathode electrode.

REFERENCES:
patent: 5462467 (1995-10-01), Macaulay et al.

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