Field emission-type electron source and method of producing...

Details Field emission-type electron source and method of producing... Field emission-type electron source and method of producing...

2007-09-11

2007-09-11

Patel, Vip (Department: 2879)

Electric lamp and discharge devices

Discharge devices having a thermionic or emissive cathode

C313S495000

Reexamination Certificate

active

10538738

ABSTRACT:
A field emission-type electron source has a plurality of electron source elements (10a) formed on the side of one surface (front surface) of an insulative substrate (11) composed of a glass substrate. Each of electron source elements (10a) includes a lower electrode (12), a buffer layer (14) composed of an amorphous silicon layer formed on the lower electrode (12), a polycrystalline silicon layer (3) formed on the buffer layer (14), a strong-field drift layer (6) formed on the polycrystalline silicon layer (3), and a surface electrode (7) formed on the strong-field drift layer (6). The field emission-type electron source can achieved reduced in-plain variation in electron emission characteristics.

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English Language Abstract of JP 11-329213.
English Language Abstract of JP 3112456.
English Language Abstract of JP 2001-155622.

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