Field emission type cold cathode and method of manufacturing...

Details Field emission type cold cathode and method of manufacturing... Field emission type cold cathode and method of manufacturing...

2007-09-04

2007-09-04

Baumeister, B. William (Department: 2891)

Semiconductor device manufacturing: process

Electron emitter manufacture

C313S309000, C313S351000, C977S742000, C977S939000

Reexamination Certificate

active

10481130

ABSTRACT:
A field emission type cold cathode, comprising a substrate having a conductivity at least on the surface thereof, an insulation layer formed on the substate and having a first opening part, a gate electrode layer formed on the insulation layer, having a center generally aligned with the center of the first opening part, and having, therein, a second opening part having an opening diameter larger than the opening diameter of the first opening part, and an emitter layer formed in the first opening part, the emitter layer characterized by further comprising the bottom surface and the side surfaces of the first opening part.

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