Field emission flat panel display with improved spacer architect

Electric lamp and discharge devices – Discharge devices having three or more electrodes – Discharge control electrode

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Details

313309, 313336, 313351, 313496, H01J 146, H01J 102

Patent

active

061372129

ABSTRACT:
A method for forming a field emission flat panel display includes deposit a conductive patterned layer on a substrate, depositing an emitter material over the patterned layer, patterning the emitter material to provide a series of mask caps, etching the emitter material to provide arrays of emitter peaks with the mask caps thereon, depositing a dielective layer on the patterned layer and on the mask caps, depositing a conductive gate layer on the dielectric layer, depositing a high-resistivity dielectric layer on the gate layer, depositing a low-resistivity dielectric layer on the high-resistivity dielectric layer, and etching away portions of the dielectric layer, gate layer, high-resistivity dielectric layer and low-resistivity dielectric layer to expose the mask caps, and removing the mask caps to expose the emitter peaks to provide an emitter cathode panel, providing a transparent panel having a conductive coating thereon, and depositing a layer of thin film phosphors on the conductive coating to provide an anode screen, and attaching the anode screen to the cathode panel.

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