Field emission element and process for manufacturing same

Details Field emission element and process for manufacturing same Field emission element and process for manufacturing same

1994-02-08

1996-12-17

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 50, H01J 902

Patent

active

055847390

ABSTRACT:
A process for manufacturing a field emission element including a substrate, and an emitter and a gate each arranged on the substrate is provided. The emitter is formed at at least a tip portion thereof with an electron discharge section, which is formed of metal or semiconductor into a monocrystalline structure or a polycrystalline structure preferentially oriented in at least a direction perpendicular to the substrate by deposition.

REFERENCES:
patent: 5141459 (1992-08-01), Zimmerman
patent: 5189341 (1993-02-01), Itoh et al.
patent: 5256936 (1993-10-01), Itoh et al.
patent: 5344352 (1994-09-01), Horne et al.
patent: 5354445 (1994-10-01), Ito et al.
patent: 5380683 (1995-01-01), Tyson et al.

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