Field emission element and process for manufacturing same

Details Field emission element and process for manufacturing same Field emission element and process for manufacturing same

1993-11-30

1995-01-10

Yusko, Donald J.

Electric lamp and discharge devices

Discharge devices having a thermionic or emissive cathode

313309, 313351, H01J 1924, H01J 1902

Patent

active

053810694

ABSTRACT:
A field emission element in which the emitter has rectangular projections at its distal end capable of readily controlling the interval between electrodes in increments as small as sub-microns, in order to reduce the voltage at which the device starts field emission at the required level and to improve emission uniformity. An emitter (2,20), a collector (3,21) and a gate (5,22) are arranged on a substrate (1), which is formed with a recess (4) in proximity to the electrodes (2,3, 20,21) other than the gate (5). The gate (5) is provided in the recess (4).

REFERENCES:
patent: 4827177 (1989-05-01), Lee et al.
patent: 4904895 (1990-02-01), Tsukamoto et al.
patent: 5030921 (1991-07-01), Kane
patent: 5189341 (1993-02-01), Itoh et al.
patent: 5256936 (1993-10-01), Itoh et al.

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