Field emission element and process for manufacturing same

Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly

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445 50, H01J 130, H01J 902

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active

056370237

ABSTRACT:
A field emission element features an emitter which has rectangular projections at its distal end capable of readily controlling the interval between electrodes in increments as small as sub-microns, in order to reduce the voltage at which the device starts field emission at the required level and to improve emission uniformity. An emitter (2,20), a collector (3,21) and a gate (5,22) are arranged on a substrate (1), which is formed with a recess (4) in proximity to the electrodes (2,3,20,21) other than the gate (5). The gate (5) is provided in the recess (4).

REFERENCES:
patent: 5189341 (1993-02-01), Itoh et al.
patent: 5192240 (1993-03-01), Komatsu
patent: 5256936 (1993-10-01), Itoh et al.
patent: 5267884 (1993-12-01), Hosogi
patent: 5402041 (1995-03-01), Kishino et al.
patent: 5469014 (1995-11-01), Itoh et al.
U.S. application No. 08/194,465, filed Feb. 08, 1994.

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