Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1975-09-17
1977-08-09
Willis, Davis L.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250310, 250311, H01J 2948
Patent
active
040413160
ABSTRACT:
A field emission electron gun provided in a housing defining a vacuum chamber comprises a field emission tip as an electron source, an anode spaced from and facing the field emission tip, the field emission tip and the anode defining a space in which the field emission tip produces electrons. An evaporation source disposed in the vacuum chamber, the evaporating material from which forms evaporation layers on the inner surface of the vacuum chamber and the anode surface. A first voltage source is interconnected between the field emission tip and the anode, in order to accelerate the electrons from the tip toward the anode, and a second voltage source is connected with the evaporation source to supply a current for the evaporation. The evaporation layers are formed before the first voltage source is actuated, whereby reactive gases adhering to and embedded to the inner surface of the vacuum chamber and the anode are suppressed from being drawn out by electron bombardment.
REFERENCES:
patent: 3327112 (1967-06-01), Akaltori
patent: 3678333 (1972-07-01), Coates et al.
patent: 3766427 (1973-10-01), Coates et al.
patent: 3927321 (1975-12-01), Welter
patent: 3931519 (1976-01-01), Coates et al.
Komoda Tsutomu
Todokoro Hideo
Anderson B. C.
Hitachi , Ltd.
Willis Davis L.
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