Field emission electron gun and method having complementary pass

Details Field emission electron gun and method having complementary pass Field emission electron gun and method having complementary pass

1990-04-10

1992-09-22

Boudreau, Leo H.

Electric lamp and discharge devices

With evacuating pump

313552, 313558, H01J 718

Patent

active

051500019

ABSTRACT:
An electron beam system comprises a vacuum enclosure, a source of electrons within the enclosure, and a passive pump located within or in communication with the enclosure for pumping gases from the enclosure. A supplemental active pump is coupled to the vacuum enclosure and functions simultaneously with the passive pump for pumping from the enclosure gases not removed, or not removed efficiently, therefrom by the passive pump.

REFERENCES:
patent: 3678333 (1972-07-01), Coates et al.
patent: 3881125 (1975-04-01), Baker et al.
patent: 4833362 (1989-05-01), Crewe
Giorgi et al., "An updated Review of Getters and Gettering", Journal of Vacuum Science & Technology, vol. 3, No. 2, Mar./Apr. 1985, pp. 417-423.
Crewe et al., "A High Resolution Scanng Transmission Microscope," Journal of Applied Physics, vol. 39, No. 13, Dec. 1968, pp. 5861-5868.

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