Semiconductor device manufacturing: process – Electron emitter manufacture
Reexamination Certificate
2006-06-06
2006-06-06
Pham, Long (Department: 2814)
Semiconductor device manufacturing: process
Electron emitter manufacture
C438S022000, C257S010000, C257S011000, C257S144000
Reexamination Certificate
active
07056753
ABSTRACT:
A field emission display with a double gate structure and a method of manufacturing therefor are provided. The field emission display includes a substrate, a cathode layer formed on the substrate, a gate insulating layer which is formed on the substrate and the cathode layer and has a cavity through which part of the cathode layer is exposed, a field emitter provided on the cathode layer exposed on the bottom of the cavity, a first gate layer which is formed in the gate insulating layer and in which a first gate hole having a diameter greater than that of the cavity is formed not to be exposed to an inner surface of the cavity, and a second gate layer which is formed on the gate insulating layer and in which a second gate hole is formed in a portion that corresponds to the cavity.
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Korean Patent Official Action and English Translation dated Jan. 27, 2005.
Ahn Pil-soo
Lee Hang-woo
Zoulkarneev Andrei
Buchanan & Ingersoll PC
Le Thao X.
Pham Long
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