Electric lamp and discharge devices – Discharge devices having a multipointed or serrated edge...
Reexamination Certificate
1998-07-30
2001-05-22
Day, Michael H. (Department: 2879)
Electric lamp and discharge devices
Discharge devices having a multipointed or serrated edge...
C313S336000, C445S024000
Reexamination Certificate
active
06236149
ABSTRACT:
TECHNICAL FIELD
The present invention relates to field emission devices and methods of forming field emission devices.
BACKGROUND OF THE INVENTION
A typical conventional field emission display is designated with reference numeral
10
in FIG.
1
. The depicted field emission device
10
comprises a faceplate
11
and an opposing baseplate
12
. In some conventional display configurations, faceplate
11
comprises a conductive member
13
having a phosphor coating
14
provided thereover and positioned to face baseplate
12
. Member
13
is typically coupled with a positive electrode thereby forming an anode. Phosphor coating
14
is configured to emit light responsive to reception of electrons emitted from baseplate
12
.
Baseplate
12
comprises a matrix addressable array of cathode emission structures or emitters
16
(only one emitter
16
is illustrated in FIG.
1
). Emitter
16
is formed from a semiconductive substrate
17
. A conductive gate
18
is provided spaced from substrate
17
. An insulative layer
19
(i.e., silicon dioxide) is typically provided intermediate substrate
17
and conductive gate
18
.
Responsive to the application of a voltage potential intermediate substrate
17
and conductor
18
, electrons are emitted from emitter
16
towards faceplate
11
. In particular, conductive gate
18
is provided at a voltage potential higher than the voltage of substrate
17
. Such results in the emission of electrons from a tip of emitter
16
. Simultaneously, the positive voltage bias applied to faceplate
11
attracts the emitted electrons toward phosphor coating
14
. Light is generated responsive to electrons striking phosphor coating
14
.
Unfortunately, it has been observed that a capacitive coupling
20
usually occurs intermediate gate conductor
18
and substrate
17
responsive to the application of a voltage potential therebetween. This resultant capacitance adversely affects the speed of operation of field emitter device
10
. Such limits the usefulness of the depicted field emitter device configuration in particular applications, such as high frequency operations.
Therefore, a need exists to provide improved field emission devices which avoid the problems associated with the prior art devices.
SUMMARY OF THE INVENTION
The present invention includes field emission devices and methods of forming field emission devices. In certain embodiments, the present invention provides field emission displays.
According to a first aspect, a field emission device includes a substrate and at least two adjacent and spaced emitters extending from the substrate. A conductor is formed spaced from the substrate and configured to receive an electrical charge to control the emission of electrons from the at least two adjacent and spaced emitters. The field emission device additionally includes a plurality of spaced insulative conductor supports positioned between the conductor and the substrate. Further, the spaced insulative conductor supports are formed intermediate the at least two adjacent and spaced emitters.
The insulative conductor supports define at least three void spaces intermediate the at least two adjacent and spaced emitters according to certain aspects of the invention. Provision of plural void spaces intermediate the conductor and the substrate reduce parasitic capacitances therebetween. A supplemental dielectric layer is formed upon surfaces of the insulative conductor supports, conductor and substrate in the preferred configurations of the present invention.
According to a second aspect of the invention, the conductor and substrate of the field emission device define a volume therebetween and all along the conductor between two adjacent emitters. The volume has a greater quantity of void space than of any non-gaseous mass, such as plural insulative supports. The defined volume includes at least two spaced masses of insulative material according to another aspect of the invention.
According to another aspect of the present invention, a field emission device includes two spaced insulative conductor supports individually having plural wall faces. The supports are positioned intermediate two adjacent emitters such that a straight line between the two adjacent emitters passes through four wall faces of the two spaced insulative supports.
A method according to another aspect of the invention comprises the steps of providing a substrate and providing at least two adjacent emitters electrically coupled with the substrate. The method further includes the steps of forming a conductor over the substrate and outwardly of individual ones of the at least two adjacent emitters. Further, the method includes providing plural insulative conductor supports between the conductor and the substrate, and intermediate the at least two adjacent emitters.
Other aspects of the invention are disclosed herein.
The devices of the present invention can have reduced parasitic capacitances. As such, the devices might be available for use in broader applications compared with prior art structures. Exemplary applications include high-speed or high-frequency applications. The devices of the present invention can provide numerous advantages including increased integration, reduced power consumption, smaller area requirements, increased speed, etc.
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patent: 5548185 (1996-08-01), Kummar et al.
patent: 5561343 (1996-10-01), Lowe
patent: 5635789 (1997-06-01), Makishima et al.
patent: 5658832 (1997-08-01), Bernhardt et al.
patent: 5695378 (1997-12-01), Hecker, Jr. et al.
patent: 5780318 (1998-07-01), Hirano et al.
patent: 5866979 (1999-02-01), Cathey, Jr. et al.
patent: 6008063 (1999-12-01), Derraa
patent: 6008576 (1999-12-01), Nakatani et al.
Day Michael H.
Micro)n Technology, Inc.
Wells, St. John, Roberts Gregory & Matkin P.S.
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