Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly
Patent
1992-01-23
1993-07-20
Seidel, Richard K.
Electric lamp or space discharge component or device manufacturi
Process
With assembly or disassembly
445 50, 1566591, H01J 912, H01J 130
Patent
active
052288773
ABSTRACT:
In a method of forming a micron-size field emitter, an array of conductive tips is formed on a substrate. A layer of dielectric material is formed on the substrate to a thickness substantially equal to the height of the tips, but forming a protuberance over each tip. A conductive grid layer is deposited over the dielectric layer, forming corresponding protuberances, followed by a layer of resist material which is of sufficiently low viscosity so that it flows off the grid layer at the protuberances leaving the protuberances substantially unprotected. The grid and dielectric layers in the protuberances are then etched away to reveal the tips through the resulting apertures in the grid and dielectric layers. The apertures are thereby automatically aligned with the tips without the need for lithographic processes.
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patent: 4168213 (1979-09-01), Hoeberechts
patent: 4943343 (1990-07-01), Bardai et al.
patent: 4964946 (1990-10-01), Gray et al.
Mat. Res. Soc. Symp. Proc., vol. 76, 1987, pp. 67-72, G. J. Campisi et al, "Microfabrication of field emission devices for vacuum integrated circuits using orientation dependent etching".
IEEE Transactions on Electron Devices, vol. 36, No. 11, Nov. 1989, New York, pp. 2703-2708, R. A. Lee et al., "Semiconductor Fabrication Technology Applied to Micrometer Valves".
Allaway Michael J.
Birrell Stuart T.
Cade Neil A.
Green Peter W.
GEC--Marconi Limited
Knapp Jeffrey T.
Seidel Richard K.
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