Field emission device resistors and method for fabricating the s

Details Field emission device resistors and method for fabricating the s Field emission device resistors and method for fabricating the s

1998-03-11

1999-12-07

Patel, Vip

Electric lamp and discharge devices

Discharge devices having a thermionic or emissive cathode

313309, 313495, H01J 105

Patent

active

059989165

ABSTRACT:
A field emission device in which resistors are used and a method for fabricating the same are provided. The resistor layer is formed by depositing diamond like carbon (DLC) on the cathodes by the PECVD method in the field emission device using the resistor according to the present invention. Accordingly, fabrication yield is high since the adhesion of the resistor layer to the cathodes is improved. Various types of resistor layers can be formed since the resistor layer has excellent chemical durability. The reliability and consistency of the fabrication process is improved since the doping level is easily controlled.

REFERENCES:
patent: 5786659 (1998-07-01), Takagi et al.

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