Field emission device having an amorphous multi-layered structur

Details Field emission device having an amorphous multi-layered structur Field emission device having an amorphous multi-layered structur

1998-02-25

2000-06-20

Patel, Nimeshkumar D.

Electric lamp and discharge devices

Discharge devices having a thermionic or emissive cathode

313495, H01J 102

Patent

active

060781335

ABSTRACT:
An amorphous multi-layered structure (100, 200) is formed by a method including the steps of: i) positioning a deposition substrate (101) in a physical vapor deposition apparatus, (300, 400, 500) ii) ionizing a precursor of a multi-phase material within the physical vapor deposition apparatus (300, 400, 500) iv) modulating the total ion impinging energy of the ions to deposit layers having predetermined properties corresponding to the total ion impinging energy values.

REFERENCES:
patent: 5675216 (1997-10-01), Kumar et al.

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