Field emission device and manufacturing method thereof

Details Field emission device and manufacturing method thereof Field emission device and manufacturing method thereof

2008-05-06

2008-05-06

Malsawma, Lex (Department: 2823)

Semiconductor device manufacturing: process

Electron emitter manufacture

C257SE21001

Reexamination Certificate

active

11347283

ABSTRACT:
It is an object to provide techniques for forming a field emission device of a field emission display device with the use of an inexpensive large-sized substrate according to the process that enables improving productivity.A field emission device according to the present invention includes a cathode electrode formed on an insulating surface of a substrate and a convex electron emission portion formed at a surface of the cathode electrode, and the cathode electrode and the electron emission portion include the same semiconductor film. The electron emission portion has a conical shape or a whiskers shape.

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