Field emission device

Electric lamp and discharge devices – Electrode and shield structures – Point source cathodes

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Details

313495, 313351, 313309, 445 24, 445 50, H01J 102, H01J 902, H01J 6302

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active

056147953

ABSTRACT:
A field emission device has a rear substrate (11), a titanium adhesive layer (12) having a striped pattern and disposed on the inner surface of the substrate (11), a tungsten cathode (13) disposed on the adhesive layer (12), a micro-tip (13') protruding from the cathode (13), an aluminum mask layer (14') having a striped pattern and disposed on the cathode (13), an insulating layer (15) having a striped pattern and disposed on the mask layer (14'), a gate (18) having a striped pattern and disposed on the insulating layer (15), and an anode (16) having a striped pattern perpendicular to the striped of the cathode (13) and disposed on a front substrate (19). The micro-tip (13') is formed by simultaneous etching of the tungsten cathode (13), the titanium adhesive layer (12), and the upper aluminum mask (14') resulting in a large internal stress in the micro-tip (13'). The residual internal stress in the micro-tip (13') results in the micro-tip (13') curving toward the anode (16) which, consequently, facilitates electron emission.

REFERENCES:
patent: 5063327 (1991-11-01), Brodie et al.
patent: 5090932 (1992-02-01), Dieumegard et al.
patent: 5148079 (1992-09-01), Kado et al.
patent: 5266155 (1993-11-01), Gray
patent: 5382867 (1995-01-01), Maruo et al.
patent: 5386172 (1995-01-01), Komatsu
patent: 5457355 (1995-10-01), Flemming

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