Field emission cold cathode with buried insulator layer

Details Field emission cold cathode with buried insulator layer Field emission cold cathode with buried insulator layer

1997-05-28

1999-10-12

Patel, Nimeshkumar D.

Electric lamp and discharge devices

Discharge devices having a multipointed or serrated edge...

313336, 313351, 313495, H01J 130

Patent

active

059659726

ABSTRACT:
A field emission cold cathode comprises an n-type silicon substrate (1), a plurality of sharp-pointed emitter cones (2) formed on the n-type silicon substrate (1), and a buried insulator layer (3) formed in the n-type silicon substrate (1) to surround each of underlying regions right under each emitter cone (2). An insulator layer (4) is formed on the n-type silicon substrate (1) and has a plurality of insulator holes so as to surround each emitter cone (2). A gate electrode (5) is formed on the insulator layer (4) and has a plurality of gate holes for extracting electrons from the emitter cones (2).

REFERENCES:
patent: 5656887 (1997-08-01), Voshell et al.

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