Field emission cold cathode element having exposed substrate

Details Field emission cold cathode element having exposed substrate Field emission cold cathode element having exposed substrate

1995-06-02

1997-07-15

O'Shea, Sandra L.

Electric lamp and discharge devices

Discharge devices having a multipointed or serrated edge...

313336, H01J 130

Patent

active

056486987

ABSTRACT:
A field emission cold cathode element having a conducting substrate, a dielectric layer which is on the substrate and has holes, emitter electrodes which have a sharp-pointed tip and stand on the substrate in the respective holes in the dielectric layer, and a gate electrode which is on the dielectric layer and has apertures right above the respective holes in the dielectric layer. The tip of each emitter electrode is near or in the aperture in the gate electrode layer. The dielectric layer is largely removed so as to remain only in limited regions around the holes for the respective emitter electrodes, and a gate electrode layer is formed with, in addition to the apertures for the emitter electrodes, a number of holes in regions where the substrate surface is exposed by removal of the dielectric layer. The partial removal of the dielectric and gate electrode layers has the effect of reducing interlayer stresses induced by temperature changes, so that the gate electrode layer can be made desirably thick.

REFERENCES:
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patent: 4874981 (1989-10-01), Spindt
patent: 5164632 (1992-11-01), Yoshida et al.
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patent: 5340997 (1994-08-01), Kuo
patent: 5401676 (1995-03-01), Lee
C.A. Spindt et al., "Physical properties of thin-film field emission cathodes with molybdenum cones," Journal of Applied Physics, vol. 47, No. 12, Dec. 1976, pp. 5248-5263.

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