Field-emission cold cathode and manufacturing method for same

Details Field-emission cold cathode and manufacturing method for same Field-emission cold cathode and manufacturing method for same

1998-02-05

1999-06-08

Chaudhuri, Olik

Electric lamp and discharge devices

Discharge devices having a multipointed or serrated edge...

313309, 313336, 313496, 445 24, 445 25, 445 27, 257 10, 438 20, H01J 130

Patent

active

059107014

ABSTRACT:
A field-emission cold cathode having emitters 9 formed on silicon substrate 1, and a gate electrode film 7 formed on insulation film 6 and having openings over the emitters, further includes trenches 3 formed in silicon substrate 1, a plurality of emitters formed on regions surrounded by trenches 3, and n-type regions 5 formed on the silicon substrate directly below the emitters. Breakdowns caused by field concentrations brought about by the spread of current directly below the emitters can thus be prevented, and thus the emitter pitch within regions surrounded by trenches can be determined at will. When high voltage is impressed due to a discharge, the resistance connected to the emitters prevents the flow of large currents to the emitters and the occurrence of short-circuit damage.

REFERENCES:
patent: 5475280 (1995-12-01), Jones et al.
patent: 5786656 (1998-07-01), Hasegawa et al.

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