Field emission cathode manufacturing method

Details Field emission cathode manufacturing method Field emission cathode manufacturing method

1999-04-29

2000-09-12

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 58, 445 50, H01J 902

Patent

active

061169757

ABSTRACT:
A field emission cathode manufacturing method is provided which comprise the steps of forming a cathode electrode on a substrate; forming an insulative layer and gate electrode, each having fine holes formed therein, in this order on the cathode electrode; thereafter immersing them in a solution in which particles of an electron-emitting substance is dispersed; and electrically depositing particles of the electron emission substance on the cathode electrode facing the fine holes by an electrophoresis using the cathode electrode as a positive or negative electrode, thereby forming an electron emitter. The wet method is adopted to form the field emission cathode, which permits to considerably reduce the plant and equipment investment and manufacture even a large-screen FED with an improved yield. Also, since the electron missive substance particles are fully exposed, a very low accuracy is allowed in producing the electron emitter. Therefore, the field emission cathode manufacturing method permits to produce a large-screen cathode plate of which the electron emission characteristic will not be deteriorated, with a greater ease and an improved yield.

REFERENCES:
patent: 5512157 (1996-04-01), Guadagno et al.
patent: 5608283 (1997-03-01), Twichell et al.
patent: 5836796 (1998-11-01), Danroc
patent: 5947783 (1999-09-01), Bojkov et al.

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