Field-emission cathode having integrated electrical interconnect

Details Field-emission cathode having integrated electrical interconnect Field-emission cathode having integrated electrical interconnect

1996-02-23

1996-12-17

Horabik, Michael

Electric lamp and discharge devices

Electrode and shield structures

Point source cathodes

313309, H01J 130

Patent

active

055856896

ABSTRACT:
A field emission cathode includes a conductive substrate (1) having emitters (4) formed thereon, a contact hole (5) extending therethrough, and a conductive layer (7) formed within the contact hole (5) thereby extending through the conductive substrate (1). A gate electrode (3) and the conductive layer (7) are insulated from the conductive substrate (1) by an insulating layer (2). The gate electrode (3) is connected to a first pull-out electrode (6) via the conductive layer (7), and the emitters (4) are connected to a second pull-out electrode (8) via the conductive substrate (1) thereby eliminating the need for bonding wires.

REFERENCES:
patent: 4393127 (1983-07-01), Greschner et al.
patent: 5075595 (1991-12-01), Kane
patent: 5315206 (1994-05-01), Yoshida
Physical Properties of Thin-Film Field Emission Cathodes with Molybdenum Cones; Journal of Applied Physics, vol. 47, pp. 5248-5263.

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