Field emission cathode having focusing electrode

Radiant energy – Ion generation – Field ionization type

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313309, G01N 2700, H01J 102

Patent

active

057238677

ABSTRACT:
In a field emission cathode, periphery portions of opening portions of a gate electrode are recessed on a side of a substrate, and a focusing electrode having opening portions which are identical in number with the opening portions of the gate electrode are disposed on the gate electrode. Further, a shield electrode having opening portions which are identical in number with opening portions of the gate electrode are disposed between the gate electrode and the focusing electrode. According to the above-mentioned construction, a focusing aberration can be reduced, and a focused electron flow can be obtained by a low electric potential of the gate electrode.

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patent: 5543680 (1996-08-01), Tomihari
A.S. Gilmour, Jr., "Microwave Tubes", Artech House, pp. 141-143, 1986.

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