Field effect transistors

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357 4, 357 23, H01L 2980

Patent

active

041830334

ABSTRACT:
A field effect transistor for operation at temperatures below 150.degree. K. is capable of operating at low voltage and current levels at high speed. The transistor is fabricated by deposition of metal source drain and gate electrodes upon a layer of semi-conductor having a concentration of free carriers less than 10.sup.16 cm.sup.-3 formed on a substrate having a resistivity greater than 10.sup.4 ohm-cm.

REFERENCES:
patent: 3958266 (1976-05-01), Athanas
patent: 3997908 (1976-12-01), Schloetterer

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