1976-05-14
1978-08-08
Wojciechowicz, Edward J.
357 4, 357 89, H01L 2978
Patent
active
041060458
ABSTRACT:
A field effect transistor includes a thin silicon layer formed on a sapphire substrate and having source, gate and drain regions. A buried layer of the same conductivity type as that of the gate region and a higher impurity concentration than that of the gate region at the lower portion of a junction between the source and gate regions.
REFERENCES:
patent: 3890632 (1975-06-01), Ham et al.
patent: 3958266 (1976-05-01), Athanas
IBM Tech. Bul., vol. 18, No. 10, Mar. 1976, Abbas et al.
The President of the Agency of Industrial Science and Technology
Wojciechowicz Edward J.
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