Field effect transistor and method for producing the field effec

Active solid-state devices (e.g. – transistors – solid-state diode – Regenerative type switching device – Controlled by nonelectrical – nonoptical external signal

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257254, 257280, 257284, 257412, 257473, 437 40, 437 44, 437176, 437203, 437228, 437235, H01L 2948, H01L 21265

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active

054710731

ABSTRACT:
In a field effect transistor including a Schottky gate electrode disposed on an active region in a compound semiconductor substrate, a compressive stress of the gate electrode and a tensile stress of an insulating film serving as a passivation are concentrated on the lower edges of the gate electrode, whereby positive piezoelectric charges are produced in the compound semiconductor substrate in the vicinity of the gate electrode. The positive piezoelectric charges increase the effective donor concentration, reducing the thickness of the surface depletion layer. As the result, channel narrowing due to the surface depletion layer is suppressed.

REFERENCES:
Zhao, "Modeling The Effects Of Surface States On DLTS Spectra of GaAs MESFET's", IEEE Transactions on Electron Devices, vol. 37, No. 5, May 1990, pp. 1235-1244.
Yeats et al., "Gate Slow Transients In GaAs MESFETs--Causes, Cures, And Impact On Circuits", IEEE pp. 842-845.
Takahashi et al., "Step-Recessed Gate Structure With An Undoped Surface Layer For Microwave And Millimeter-Weave High Power, High Efficiency GaAs MESFETs", IEICE Transactions, vol. E 74, No. 12, Dec. 1991, pp. 4141-4146.

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