Field effect pressure sensor

Details Field effect pressure sensor Field effect pressure sensor

1989-04-17

1990-01-16

Hille, Rolf

Electricity: electrical systems and devices

Safety and protection of systems and devices

With specific current responsive fault sensor

357 25, 357 236, 73724, 361283, H01L 2984, H01L 2966, H01L 2978, G01L 912

Patent

active

048946982

ABSTRACT:
A pressure sensor of the field-effect type includes a transistor having a gate insulation film above which a hollow chamber is provided, a gate electrode movable and deformable by pressure is formed above the gate insulation film through the hollow chamber, and an auxiliary gate electrode is provided on the boundary plane between the gate insulation film and hollow chamber, whereby the value of pressure can be detected by the drain-current variation of the transistor.

REFERENCES:
patent: 3436492 (1969-04-01), Reedyk
patent: 3440873 (1967-05-01), Eichelberger
patent: 3596228 (1969-05-01), Read et al.
patent: 3886584 (1975-05-01), Cook, Jr. et al.
patent: 3978508 (1976-08-01), Vilkomerson
patent: 4287501 (1981-09-01), Tominaga et al.
patent: 4397714 (1983-08-01), Janata et al.
patent: 4411741 (1983-10-01), Janata
patent: 4480488 (1984-11-01), Read et al.
patent: 4495820 (1985-01-01), Shimada et al.
patent: 4581624 (1986-04-01), O'Connor

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