Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
Reexamination Certificate
2005-01-11
2005-01-11
Flynn, Nathan J. (Department: 2826)
Active solid-state devices (e.g., transistors, solid-state diode
Alignment marks
C430S022000, C430S030000, C355S053000, C355S077000
Reexamination Certificate
active
06841889
ABSTRACT:
Methods of correcting for overlay error, wherein the methods account for relative offset across the field of exposures of more than one photolithography projection system, as well as systems to perform the methods and apparatus produced therefrom. The methods include defining at least two zones within a field of a mask having substantially similar overlay error values. The methods further include modifying the coordinates of a feature of the mask in response to a correction for the zone to which the feature is mapped, where the correction corresponds to a nominal overlay error value for that zone.
REFERENCES:
patent: 5795688 (1998-08-01), Burdorf et al.
patent: 5801954 (1998-09-01), Le et al.
patent: 5877861 (1999-03-01), Ausschnitt et al.
patent: 5885734 (1999-03-01), Pierrat et al.
patent: 5952134 (1999-09-01), Hwang
patent: 5978085 (1999-11-01), Smith et al.
patent: 5989762 (1999-11-01), Takaoka
patent: 6097473 (2000-08-01), Ota et al.
patent: 6128070 (2000-10-01), Peng
patent: 6165656 (2000-12-01), Tomimatu
patent: 6356343 (2002-03-01), Shiraishi et al.
patent: 6396569 (2002-05-01), Zheng et al.
patent: 6432591 (2002-08-01), Baluswamy et al.
patent: 6440612 (2002-08-01), Baggenstoss
patent: 20010017693 (2001-08-01), Zheng et al.
patent: 20020070355 (2002-06-01), Ota
Preil, M..E. ,et al. ,“Minimization of Total Overlay Errors when Matching Non-Concentric Exposure Fields”,The International Society for Optical Engineering, 2197, (1994),pp. 753-767.
Flynn Nathan J.
Greene Pershelle
Micro)n Technology, Inc.
Schwegman Lundberg Woessner & Kluth P.A.
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