Fiducial alignment marks on microelectronic spring contacts

Details Fiducial alignment marks on microelectronic spring contacts Fiducial alignment marks on microelectronic spring contacts

2005-08-23

2005-08-23

Nguyen, Vinh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S755090

Reexamination Certificate

active

06933738

ABSTRACT:
Microelectronic spring contacts with fiducial alignment marks for use on a semiconductor wafer contactor or similar apparatus, and methods for making such marks, are disclosed. Each alignment mark is placed on a pad adjacent to a contact tip. The alignment mark is positioned on the pad so that it will not contact the terminal or any other part of a wafer under test. The alignment mark and the contact tip are preferably positioned on the pad in the same lithographic step. Then, the pad and like pads, selected ones of which also have similar alignment marks, are attached to the ends of an array of resilient contact elements. A plurality of alignment marks in accurate registration with a plurality of contact tips on a contactor is thus disclosed. Configurations for ensuring that the alignment marks remain free of debris and easily located for essentially the entire life of the contactor are disclosed, as are various different exemplary shapes of alignment marks.

REFERENCES:
patent: 5686318 (1997-11-01), Farnworth et al.
patent: 6239590 (2001-05-01), Krivy et al.
patent: 6285203 (2001-09-01), Akram et al.
patent: 61154044 (1986-07-01), None
patent: 02065150 (1990-03-01), None
patent: 06209033 (1994-07-01), None
patent: 10160793 (1998-06-01), None

Affiliated with

Also associated with

Rating

Fiducial alignment marks on microelectronic spring contacts does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fiducial alignment marks on microelectronic spring contacts, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fiducial alignment marks on microelectronic spring contacts will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3510529