Fiber probe fabrication having a tip with concave sidewalls

Details Fiber probe fabrication having a tip with concave sidewalls Fiber probe fabrication having a tip with concave sidewalls

1994-05-20

1996-01-02

Powell, William

Etching a substrate: processes

Forming or treating fibrous article or fiber reinforced...

216 49, 216 91, 216 97, B44C 122, C03C 1500

Patent

active

054800463

ABSTRACT:
A probe device is fabricated from a glass fiber segment by first isotropically etching only a portion of the diameter of only a bottom region thereof. Next, the bottom region is cleaved, to produce a cleaved bottom endface. Then the cleaved endface and a height of the sidewalls of the bottom region that is less than its total height are coated with a protective masking layer. The fiber segment is immersed in an isotropic etching solution, whereby its diameter is reduced. Finally, the masking layer is stripped off, and the bottom region is etched again until the (maximum) diameter of the cleaved endface is reduced to a desired value.

REFERENCES:
patent: 4604520 (1986-08-01), Pohl
patent: 5018865 (1991-05-01), Ferrell et al.
patent: 5272330 (1993-12-01), Betzig et al.
patent: 5290398 (1994-03-01), Feldman et al.
Wickramasinghe, H. K., "Scanned-Probe Microscopes," Scientific American, vol. 261, No. 4, pp. 98-105 (Oct. 1989).
Binnig, G. et al., "Atomic Force Microscope," Phys. Rev. Lett., vol. 56, No. 9, Mar. 3, 1986, pp. 930-933.
Pangaribuan, T. et al., "Reproducible Fabrication Technique of Nanometric Tip Diameter Fiber Probe For Photon Scanning Tunneling Microscope," Japan Journal Applied Physics, vol. 31 (1992), pp. L 1302-L 1304, Part 2, No. 9A, 1 Sep. 1992.
Cassidy, R., "R & D Microscopy--Pick the Right Probe For Your SPM Needs," R & D Magazine, Sep. 1993, pp. 57-58.

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