Fiber optic scatterometer for measuring optical surface roughnes

Details Fiber optic scatterometer for measuring optical surface roughnes Fiber optic scatterometer for measuring optical surface roughnes

1989-02-13

1991-02-12

McGraw, Vincent P.

Optics: measuring and testing

Of light reflection

With diffusion

25022729, G01N 2147

Patent

active

049919717

ABSTRACT:
A method and apparatus for measuring scattered light reflectance. The apparatus comprises a plurality of individual light transmitting fibers having first receiving ends positioned at different angular locations about an object to be tested and second exiting ends positioned in a linear array. The apparatus can simultaneously receive different angular components of scattered light from the object being tested and convert the scattered light components into a linear array.

REFERENCES:
patent: 3835315 (1974-09-01), Gravitt, Jr.
patent: 3999864 (1976-12-01), Mutter
patent: 4412746 (1983-11-01), Yokouchi
patent: 4492121 (1985-01-01), Lehto
patent: 4541719 (1985-09-01), Wyatt
patent: 4583861 (1986-04-01), Yamaji et al.
patent: 4806018 (1989-02-01), Falk
patent: 4859062 (1989-08-01), Thurn et al.

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