Measuring and testing – Vibration – Sensing apparatus
Reexamination Certificate
2007-02-12
2010-06-29
Chapman, John E (Department: 2856)
Measuring and testing
Vibration
Sensing apparatus
C073S514260, C356S482000
Reexamination Certificate
active
07743661
ABSTRACT:
The present invention relates to an optic seismic MEMS sensor. More specifically, a proof mass is supported by a frame having supporting beams. The proof mass is positioned within the frame and has a hinged attachment to the beams. The proof mass has a sensor gap having a first reflector and a second reflector positioned at opposing ends of the sensor gap. An optical fiber injects light into the sensor gap and light is reflected to determine seismic movement of the proof mass with respect to the frame. Stops are provided for limiting the movement of the proof mass to minimize strain on the attachment of the beams and the proof mass.
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Berthold John W.
Bush Ira Jeffrey
McNair Fred
Zhou Tiansheng
Booth Albanesi & Schroeder LLC
Chapman John E
Halliburton Energy Service,s Inc.
Schroeder Peter V.
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