Fiber embedded polishing pad

Details Fiber embedded polishing pad Fiber embedded polishing pad

2007-03-06

2007-03-06

Nguyen, Dung Van (Department: 3723)

Abrading

Abrading process

C451S532000

Reexamination Certificate

active

11271744

ABSTRACT:
A polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The loose fibers define and the precursors were mixed first with curatives, then mold into a pad form. The pad may include a thin layer of free fibers at its polishing surface. A segment of at least a portion of the free fibers are embedded in the adjacent body of the polymer and fibers.

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