Fiber embedded polishing pad

Details Fiber embedded polishing pad Fiber embedded polishing pad

2005-11-15

2005-11-15

Nguyen, Dung Van (Department: 3723)

Abrading

Flexible-member tool, per se

Comprising fibers

C451S527000, C451S041000

Reexamination Certificate

active

06964604

ABSTRACT:
A polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The loose fibers define and the precursors were mixed first with curatives, then mold into a pad form. The pad may include a thin layer of free fibers at its polishing surface. A segment of at least a portion of the free fibers are embedded in the adjacent body of the polymer and fibers.

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