Fiber bundle homogenizer and method utilizing same

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350 9610, 350320, 362 32, 362259, 372 57, 65 42, 65 43, 2191216, 21912161, 21912179, G02B 604, F21V 704, C03B 2320, H01S 322

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049327470

ABSTRACT:
An apparatus and method are provided to homogenize the intensity profile of the beam emitted by an excimer laser. The excimer laser beam is collected by a closely packed ultraviolet-grade optical fiber bundle array having its individual fibers intermingled in a random or preconceived format to result in an intermixing of the light from the individual fiber cores to produce a uniform intensity profile. The output ends of the fibers are gathered or fused, and optionally tapered. before being cleaved to provide an output face that is custom shaped for a desired illumination pattern. The flexible nature of the fiber bundle allows for remote materials processing applications.

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