Fiber amplifier based light source for semiconductor inspection

Details Fiber amplifier based light source for semiconductor inspection Fiber amplifier based light source for semiconductor inspection

2011-04-12

2011-04-12

Nguyen, Dung T (Department: 2828)

Coherent light generators

Optical fiber laser

C372S010000, C372S017000, C372S018000

Reexamination Certificate

active

07924892

ABSTRACT:
A laser illuminator for use in an inspection system, such as a semiconductor wafer inspection system or photomask inspection system is provided. The gain medium in the illuminator comprises optical fiber, and amplification, beam splitting, frequency and/or bandwidth conversion, peak power reduction, and q-switching or mode locking may be employed. Certain constructs including doped fiber, gratings, saturable absorbers, and laser diodes are disclosed to provide enhanced illumination.

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