Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1997-05-21
1999-03-16
Rosasco, S.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
20419234, G03F 900
Patent
active
058828230
ABSTRACT:
A method of repairing a defect on a substrate includes the steps of shining a beam, such as a focused ion beam, on a substrate to remove a portion of the defect and to leave a thin wall of the defect, and then providing a second removal step, such as an isotropic etch, to substantially remove the thin wall, wherein the second removal step comprises a process different from the original shining step.
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International Business Machines - Corporation
Leas James M.
Rosasco S.
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