FET sensor apparatus of flow-cell adaptive type and method of ma

Details FET sensor apparatus of flow-cell adaptive type and method of ma FET sensor apparatus of flow-cell adaptive type and method of ma

1990-09-28

1992-08-11

Wieder, Kenneth A.

Electricity: measuring and testing

Determining nonelectric properties by measuring electric...

Semiconductors for nonelectrical property

324450, 204416, G01N 27414

Patent

active

051382512

ABSTRACT:
An FET sensor apparatus comprising a sensor, a base member, and a support. The sensor comprises a semiconductor substrate having a predetermined crystal plane, a field-effect transistor formed on the semiconductor substrate, and a gate portion arranged on at least one of the major surfaces of the semiconductor substrate. The base member has a through hole in which the field-effect transistor is fitted. The support supports the sensor in the through hole in watertight fashion, with said gate portion exposed through an end of the hole.

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