FET Controlled thyristor

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Details

357 43, 357 234, H01L 2974, H01L 2702, H01L 2978

Patent

active

045020701

ABSTRACT:
Controlled semiconductor switch with a semiconductor body containing a thyristor structure having a first zone of first conductivity type embedded in coplanar relationship in a second zone of second conductivity type; also containing a third zone of the first conductivity type and a fourth zone of the second conductivity type; and further containing an MIS-FET integrated into the semiconductor body and having a source zone of the first conductivity type embedded in coplanar relationship in a zone of the second conductivity type; an insulating layer disposed on the surface of the semiconductor body, a control electrode lying on the insulating layer and covering a first channel zone operatively associated with the FET; and a cathode electrode on the semiconductor body, including the features that the zone of the second conductivity type of the MIS-FET is embedded in the third zone in coplanar relationship therewith and forms the first channel zone at the surface of the semiconductor body; the second zone of the thyristor structure is embedded in the third zone in coplanar relationship therewith and forms a second channel zone at the surface of the semiconductor body; the third zone extends to the surface of the semiconductor body between the two channel zones; the control electrode also covers the second channel zone and the part of the third zone extending to the surface of the semiconductor body; and the cathode electrode is in contact with the source zone of the MIS-FET.

REFERENCES:
patent: 3697830 (1972-10-01), Dale
patent: 4223328 (1980-09-01), Terasawa et al.
patent: 4364073 (1982-12-01), Becke et al.

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