Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate
2007-08-21
2007-08-21
Pham, Thanhha S. (Department: 2813)
Semiconductor device manufacturing: process
Having magnetic or ferroelectric component
C438S622000, C438S641000, C438S642000, C438S678000, C257SE21208
Reexamination Certificate
active
11644792
ABSTRACT:
A method of forming a ferromagnetic liner on conductive lines of magnetic memory devices and a structure thereof. The ferromagnetic liner increases the flux concentration of current run through the conductive lines, reducing the amount of write current needed to switch magnetic memory cells. The conductive lines are formed in a plate-up method, and the ferromagnetic liner is selectively formed on the plated conductive lines. The ferromagnetic liner may also be formed over conductive lines and a top portion of vias in a peripheral region of the workpiece.
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Gaidis Michael C.
Leuschner Rainer
Romankiw Lubomyr Taras
Rubino Judith M.
International Business Machines - Corporation
Pham Thanhha S.
Slater & Matsil L.L.P.
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