Stock material or miscellaneous articles – Composite – Of inorganic material
Patent
1995-09-07
1999-09-21
Speer, Timothy
Stock material or miscellaneous articles
Composite
Of inorganic material
428450, 428469, 428472, 428701, B32B 1700
Patent
active
059552131
ABSTRACT:
On a single crystal substrate such as silicon, a ferroelectric thin film having a YMnO.sub.3 hexagonal crystal structure, composed mainly of a rare earth element (inclusive of scandium and yttrium), manganese and oxygen, and c-plane oriented parallel to the substrate surface is formed, preferably with an epitaxial oxide film or conductive epitaxial film being interposed therebetween. It is suitable for gate type non-volatile memory devices having MFIS and MFMIS structures.
REFERENCES:
Takashi Nakamura, Yuichi Nakao, Kazuhiro Hoshiba, Katsumi Samashima, Akira Kamisawa and Hidemi Takasu, "Study of Ferroelectric Thin Films for Application to DNRO Nonvolatile Memories", Technical Report of IEICE. SDM93-130, Nov., 1993.
Hiroshi Maiwa, Noboru Ichinose and Kiyoshi Okazake, "Crystalline Structure of PbTiO.sub.3 Thin Films by Multiple Cathode Sputtering", Jpn. J. Appl. Phys. vol. 31 (1992) pp. 3029-3032, Part 1, No. 98, Sep. 1992.
Takashi Hase, Kazuo Hirata, Kazushi Amanuma, Naokichi Hosokawa and Yoichi Miyasaka, "Preparation of Pb(Zr, Ti)O.sub.3 Thin Films by Multitarget Sputtering", Jpn. J. Appl. Phys. vol. 33 (1994) pp. 5244-5248, Part 1, No. 98, Sep. 1994.
Jiyoung Kim, C. Sudhama, Rajesh Khamankar and Jack Lee, "Ultra-Thin Sputtered PZT Films For ULSI Drams", Mat. Res. Soc. Sympo. Proc., 310 (1993) pp. 473-478.
Landolt-Bornstein, Numerical Data and Functional Relationships in Science and Technology, Group III: Crystal and Solid State Physics, vol. 16, Revised, Updated and Extended Edition of vols. III/3 and III/9, Ferroelectrics and Related Substances, Subvolume a: Oxides, (1981), pp. 1-43.
Noguchi Takao
Yano Yoshihiko
Speer Timothy
TDK Corporation
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