Coating processes – Electrical product produced – Metallic compound coating
Patent
1998-11-05
2000-06-06
Beck, Shrive
Coating processes
Electrical product produced
Metallic compound coating
427240, 4273762, 4274192, B05D 302, B05D 312
Patent
active
060715553
ABSTRACT:
Thin films of ferroelectric composite material comprising barium strontium titanate (BSTO) combined with magnesium oxide additive are produced by metalorganic decomposition. The barium strontium titanate magnesium oxide ferroelectric composite comprises Ba.sub.1-x Sr.sub.x TiO.sub.3 /MgO, wherein x is greater than 0.0 but less than or equal to 0.75 and preferably is 0.4, and wherein the weight ratio of BSTO to magnesium oxide may range from 99 to 40 weight percent BSTO to 1 to 60 weight percent magnesium oxide. These films have desirable electronic properties and may have application to both active microwave and dynamic random access memory devices, including low dielectric constant, low loss factor, high tunability, and high resistivity. The films produced are uniformly thick and impurity free, with thicknesses of only 0.4 microns.
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Joshi et al., "Characterization of Ba0.6Sr0.4TiO3 Thin Films with Mg Addie Fabricated by Metalorganic Decomposition Technique", Integrated Ferroelectrics, vol. 19, pp. 141-148, Jun. 1998.
"Characterization of Ba.sub.0.6 Sr.sub.0.4 TiO.sub.3 Thin Films with Mg Additive Fabricated by Metalogganic Decomposition Technique," P.C. Joshi, S. Ramanathan, S.B. Desu, S. Stowell and S. Sengupta, Jun. 1998. Integrated Ferroelectrics vol. 19, pp. 141-148.
Desu Seshu B.
Joshi Pooran C.
Ramanathan Sasangan
Sengupta Louise
Sengupta Somnath
Barr Michael
Beck Shrive
Biffoni U. John
Clohan, Jr. Paul S.
The United States of America as represented by the Secretary of
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