Ferroelectric/silicide/silicon multilayer and method of making t

Details Ferroelectric/silicide/silicon multilayer and method of making t Ferroelectric/silicide/silicon multilayer and method of making t

1993-02-01

1996-06-04

Jordan, Charles T.

Stock material or miscellaneous articles

Composite

Of silicon containing

428697, 428701, 428702, B32B 904

Patent

active

H00015431

ABSTRACT:
A ferroelectric/silicide/silicon multilayer is made by a method including e steps of

REFERENCES:
patent: 5053917 (1991-10-01), Miyasaka et al.
patent: 5070385 (1981-12-01), Evans, Jr. et al.
patent: 5099305 (1992-03-01), Takenaka
patent: 5122923 (1992-06-01), Matsubara et al.

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