Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate
2005-08-02
2005-08-02
Le, Dung A. (Department: 2818)
Semiconductor device manufacturing: process
Having magnetic or ferroelectric component
C438S257000, C438S258000, C438S593000
Reexamination Certificate
active
06924155
ABSTRACT:
A method of manufacturing a ferroelectric memory of the present invention includes applying pulsed laser light70to a ferroelectric capacitor105from above the ferroelectric capacitor in a state in which at least the ferroelectric capacitor105is formed over a substrate10.
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U.S. Appl. No. 10/397,431, filed Mar. 27, 2003, Sawasaki.
U.S. Appl. No. 10/397,315, filed Mar. 27, 2003, Sawasaki.
Hamada Yasuaki
Kobayashi Tomokazu
Natori Eiji
Sawasaki Tatsuo
Le Dung A.
Oliff & Berridg,e PLC
Seiko Epson Corporation
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