Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate
2006-07-11
2006-07-11
Wilczewski, Mary (Department: 2822)
Semiconductor device manufacturing: process
Having magnetic or ferroelectric component
C438S240000, C438S393000, C438S396000, C438S785000
Reexamination Certificate
active
07074624
ABSTRACT:
A method of manufacturing a ferroelectric film includes crystallizing a raw material having a complex oxide, the method including: performing a heat treatment in a first condition in which a predetermined pressure and a predetermined temperature are applied; and maintaining a second condition, in which a pressure and a temperature lower than the pressure and the temperature in the first condition are applied, after the heat treatment in the first condition, and the raw material is crystallized by repeating the heat treatment in the first condition and the maintaining the second condition.
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Hamada Yasuaki
Karasawa Junichi
Kijima Takeshi
Natori Eiji
Ohashi Koji
Oliff & Berridg,e PLC
Thomas Toniae M.
Wilczewski Mary
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